JPH0551180B2 - - Google Patents

Info

Publication number
JPH0551180B2
JPH0551180B2 JP11186386A JP11186386A JPH0551180B2 JP H0551180 B2 JPH0551180 B2 JP H0551180B2 JP 11186386 A JP11186386 A JP 11186386A JP 11186386 A JP11186386 A JP 11186386A JP H0551180 B2 JPH0551180 B2 JP H0551180B2
Authority
JP
Japan
Prior art keywords
substrate
holder
light
ion beam
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11186386A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62268139A (ja
Inventor
Tsuneo Hiramatsu
Shiro Shiojiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP11186386A priority Critical patent/JPS62268139A/ja
Publication of JPS62268139A publication Critical patent/JPS62268139A/ja
Publication of JPH0551180B2 publication Critical patent/JPH0551180B2/ja
Granted legal-status Critical Current

Links

JP11186386A 1986-05-15 1986-05-15 基板検出装置 Granted JPS62268139A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11186386A JPS62268139A (ja) 1986-05-15 1986-05-15 基板検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11186386A JPS62268139A (ja) 1986-05-15 1986-05-15 基板検出装置

Publications (2)

Publication Number Publication Date
JPS62268139A JPS62268139A (ja) 1987-11-20
JPH0551180B2 true JPH0551180B2 (en]) 1993-07-30

Family

ID=14572051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11186386A Granted JPS62268139A (ja) 1986-05-15 1986-05-15 基板検出装置

Country Status (1)

Country Link
JP (1) JPS62268139A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10108745A (ja) * 1996-10-04 1998-04-28 Touzai Kagaku Sangyo Kk 流し台

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4705450B2 (ja) * 2005-03-11 2011-06-22 株式会社ディスコ ウェーハの保持機構
JP5558673B2 (ja) * 2008-03-25 2014-07-23 大日本スクリーン製造株式会社 熱処理装置
KR102597414B1 (ko) * 2022-02-21 2023-11-02 (주)디바이스이엔지 기판 검출유닛을 구비한 기판 식각 처리장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10108745A (ja) * 1996-10-04 1998-04-28 Touzai Kagaku Sangyo Kk 流し台

Also Published As

Publication number Publication date
JPS62268139A (ja) 1987-11-20

Similar Documents

Publication Publication Date Title
KR960042926A (ko) 기판회전처리방법 및 회전식 기판처리장치
KR970018342A (ko) 매거진의 매거진 선반들을 위한 인덱서 및 그안에 내장된 웨이퍼형상으로 된 대상물
JPH0551180B2 (en])
JPS6365904B2 (en])
JP3568482B2 (ja) 板状体の傷検出方法及び装置
JPH08316290A (ja) 回転式基板処理装置
JP3179206B2 (ja) ウエハ検出装置
JPH0817901A (ja) 半導体ウェハ保管装置及びその不良収納検出方法
JPH0723899Y2 (ja) 基板検出装置
US5149982A (en) Foreign particle inspection apparatus
US6242760B1 (en) Optical semiconductor device with enhanced light reception
JPS6371794A (ja) 透明カ−ド検出装置
JPH0964155A (ja) 基板保持状態確認方法および装置
JPH0669323A (ja) ウエハ検出装置およびウエハ位置決め装置
JPS61186806A (ja) 透明体の欠点検出装置
JPS5944578B2 (ja) 透明な被検査物の欠陥検出方法
JPS63208747A (ja) 光学検査装置
JPH04128605A (ja) オリエンテーションフラット検出装置
JPH0989793A (ja) 異物検査装置
JPH0617213Y2 (ja) ディスクプレーヤ
JPS63205588A (ja) 反射式光電検出装置
JPH01138447A (ja) 異物検出方法
JPH06150871A (ja) ウェーハ浮き上がり検出装置
JP2000068358A (ja) ウェハ位置検出方法及びそれに使用するクリーンボックス
JP2891580B2 (ja) 基板の厚さ判別機構